The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY
Work
Year: 2004
Type: article
Source: AIP conference proceedings
Author Frank Siewert
Cites:
Cited by: 149
Related to: 10
FWCI: 1.729
Citation percentile (by year/subfield): 96.14
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Sustainable cities and communities
Open Access status: closed