Effects of electron current and collisional interactions in inductively coupled plasma (ICP) reactors
Year: 2002
Type: conference-paper
Abstract: In continuum modeling of low pressure plasma discharges, electron collisional interaction terms are modeled using collision frequencies based on electron temperature. However, this becomes inaccurate in ICP reactors where the directed azimuthal electron velocity can become comparable to the electron thermal velocity, significantly altering electron transport properties and the azimuthal current and electric field relationship. By retaining the directed relative velocities in the collision integrals for multi-temperature mixtures, we have derived necessary corrections for plasma conductivity. Computational results of an argon discharge (10 mTorr) show that these corrections result in increased collision frequencies, leading to increased total power deposition of about 10 % at 500 W in a 300 mm TCP reactor, for a constant inductive coil current. This increase is expected to be significant at high powers and low pressures. A correction of electrical conductivity also results in significant changes in both electric field and current density in the azimuthal direction.
Authors: C. H. Chang, D.K. Bose
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: Los Alamos National Laboratory
Award: G2713861829
OpenAlex ID: W1592380794