Work

High speed, large deflection deformable mirrors for focus and spherical aberration control

Year: 2003

Type: conference-paper

Source: IEEE/LEOS International Conference on Optical MEMS

DOI: 10.1109/omems.2002.1031507

Authors: P. Himiner, D. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1601105543

FWCI: 1.729

Cites: 1

Cited by: 9

Related to: 10