Work

Thermo-acoustic engineering of silicon microresonators via evanescent waves

Year: 2015

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.4923056

Authors: R. Tabrizian, F. Ayazi

Institutions: University of Michigan, Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1602287635

FWCI: 1.824

Cites: 23

Cited by: 20

Related to: 10