Work

Towards Routine Backside SIMS Sample Preparation for Efficient Support of Advanced IC Process Development

Year: 2009

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.3251268

Authors: M. J. P. Hopstaken, C. Cabral, D. Pfeiffer, C. Molella, P. Ronsheim, Erik M. Secula, David G. Seiler, Rajinder P. Khosla, Dan Herr, C. Michael Garner, Robert McDonald, Alain C. Diebold

Institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1640220027

FWCI: 2.908

Cites:

Cited by: 7

Related to: 10