Work

Directed Assembly of Block Copolymers to Pattern Isolated Features and Essential Integrated Circuit Geometries

Year: 2007

Type: article

Source: Bulletin of the American Physical Society

Authors: Mark P. Stoykovich, Hyun Kang, Guoliang Liu, Kostas Ch. Daoulas, Juan Pablo, Marcus Mueller, P. F. Nealey

Language: English

Topic: Block Copolymer Self-Assembly

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1654236959

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