Work

Vacuum Pumping Performance Comparison of Non-Evaporable Getter Thin Films Deposited Using Argon and Krypton as Sputtering Gases

Year: 2006

Type: conference-paper

Source: Particle Accelerator Conference (PAC)

DOI: 10.1109/pac.2005.1591294

Authors: Xianghong Liu, M. Adam, Yun He, Yulin Li

Institution: Cornell University

Language: English

Topic: Particle accelerators and beam dynamics

Subfield: Aerospace Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1658726011

FWCI:

Cites: 3

Cited by: 5

Related to: 10