Effects of Al content on the electrical properties of LaxAlyOz films grown on TiN substrate by atomic layer deposition
Year: 2007
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.2709951
Authors: Su Young Kim, Hyuk Kwon, Sang Jin Jo, Jeong Sook Ha, Won Tae Park, Dong Kyun Kang, Byong-Ho Kim
Institution: Korea University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1664789272