Fabrication of Si/Si 1-x Ge x waveguide WDM components
Year: 1997
Type: conference-paper
DOI: 10.1117/12.273852
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1671987791
