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Wafer level defect density distribution using checkerboard test structures

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts.1998.688050

Authors: C. Hess, L.H. Weiland

Institution: Karlsruhe Institute of Technology

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1676202359

FWCI:

Cites: 5

Cited by: 7

Related to: 10