Work

X-ray Microscopy for Interconnect Characterization

Year: 2009

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.3251210

Authors: Jeff Gelb, Wenbing Yun, Michael Feser, Andrei Tkachuk, Erik M. Secula, David G. Seiler, Rajinder P. Khosla, Dan Herr, C. Michael Garner, Robert McDonald, Alain C. Diebold

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1677002023

FWCI: 0.895

Cites: 6

Cited by: 8

Related to: 10