Development of InP-based test structures for optical MEMS applications
Year: 2002
Type: conference-paper
Authors: M. Pruessner, R. Grover, L. Calhoun, R. Ghodssi
Institution: University of Maryland, College Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W1781743485