Work

Key considerations in the development of defect sampling methodologies

Year: 2002

Type: conference-paper

Source: ASMC proceedings

DOI: 10.1109/asmc.1996.557977

Authors: M. McIntyre, R.K. Nurani, R. Akella

Institutions: Advanced Micro Devices (United States), KLA (United States), University of California, Berkeley, Stanford University

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W1843429319

FWCI: 0.852

Cites: 4

Cited by: 7

Related to: 10