Work

Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methods

Year: 2004

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems.2004.1290703

Authors: C.V. Jahnes, J. Cotte, J.L. Lund, H. Deligianni, A. Chinthakindi, L.P. Buchwalter, P. Fryer, J.A. Tornello, N. Hoivik, J.H. Magerlein, D. Seeger

Institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1861770194

FWCI: 4.071

Cites: 8

Cited by: 23

Related to: 10