Work

Progress in CMOS integrated measurement systems

Year: 2003

Type: conference-paper

Source: Conference proceedings - IEEE Instrumentation/Measurement Technology Conference

DOI: 10.1109/imtc.1999.776719

Authors: H. Baltes, O. Brand

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Eidgenössische Technische Hochschule Zürich

OpenAlex ID: W1867691498

FWCI:

Cites: 14

Cited by: 1

Related to: 10