Work

Cantilever Beam Resonators

Year: 2002

Type: book-chapter

Source: Microtechnology and MEMS

DOI: 10.1007/978-3-662-05060-6_3

Authors: D. Lange, O. Brand, H. Baltes

Institutions: Stanford SystemX Alliance, Stanford University, ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W18701523

FWCI:

Cites:

Cited by: 1

Related to: 10