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Integration of IC technology with MEMS: Silicon+ technology for the future

Year: 2007

Type: conference-abstract

DOI: 10.1049/ic.2007.1707

Authors: A.J. Walton, J.T.M. Stevenson, I. Underwood, J.G. Terry, S. Smith, W. Parkes, C. Dunare, H. Lin, Y. Li, R. Henderson, D. Renshaw, K. Muir, M. Desmulliez, D. Flynn, M.J. Maclntosh, W.S. Holland, A.F. Murray, T.B. Tang, A. Bunting, A.M. Gundlach

Institutions: Heriot-Watt University, UK Astronomy Technology Centre, University of Edinburgh

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1878929128

Cites:

Cited by: 3

Related to: 10