Work

High-tone bulk acoustic resonator integrated with surface micromachined GBAR filter on a single chip

Year: 2005

Type: conference-paper

DOI: 10.1109/sensor.2005.1497507

Authors: Wei Pang, Han Zhang, Jong Jin Kim, Hongyu Yu, Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1891721705

FWCI: 0.776

Cites: 8

Cited by: 4

Related to: 10