Low Dielectric Constant Materials for ULSI Interconnects
Year: 2000
Type: article
Authors: Michael Morgen, E. Todd Ryan, Jie-Hua Zhao, Chuan Hu, Taiheui Cho, Paul S. Ho
Institution: The University of Texas at Austin
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1898734385