Year: 2015
Type: article
Abstract: We have developed capacitively-transduced nanomechanical resonators using sp(2)-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.
Source: Nanoscale
DOI: 10.1039/c5nr02820e
Authors: Matti Tomi, Andreas Isacsson, Mika Oksanen, Dmitry Lyashenko, Jukka-Pekka Kaikkonen, Sanna Tervakangas, Jukka Kolehmainen, Pertti J. Hakonen
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W1903715450