Work

MEMS chemical gas sensor

Year: 2003

Type: conference-paper

Source: Biennial University/Government/Industry Microelectronics Symposium

DOI: 10.1109/ugim.1999.782842

Authors: F. Zee, J. Judy

Institution: University of California, Los Angeles

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1910880057

FWCI: 1.297

Cites: 3

Cited by: 10

Related to: 10