Work

A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers

Year: 2005

Type: conference-paper

DOI: 10.1109/sensor.2005.1496511

Authors: A. Modafe, N. Ghalichechian, A. Frey, J.H. Lang, R. Ghodssi

Institutions: University of Maryland, College Park, Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W1924764337

FWCI: 3.298

Cites: 9

Cited by: 9

Related to: 10