Work

Resonant MEMS Chemical Sensors

Year: 2015

Type: other

Source: Advanced micro & nanosystems

DOI: 10.1002/9783527676330.ch15

Authors: Luke A. Beardslee, Oliver Brand, Fabien Josse

Institutions: University at Albany, State University of New York, Georgia Institute of Technology, Marquette University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1939856878

Cites: 131

Cited by: 2

Related to: 10