Ultra high spatial resolution SIMS with cluster ions — approaching the physical limits
Year: 2012
Type: article
Source: Surface and Interface Analysis
DOI: 10.1002/sia.5093
Authors: Felix Kollmer, Wolfgang Paul, Martin Krehl, Ewald Niehuis
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1946833176
