Work

Microcantilever deflection compensation with focused ion beam exposure

Year: 2011

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/21/8/085007

Authors: Seunghyun Kim, Tim Gustafson, Danny C Richards, Weisheng Hu, Gregory P Nordin

Institution: LeTourneau University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1963681171

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Cites: 14

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Related to: 10