Work

Metal-organic thin-film encapsulation for MEMS

Year: 2008

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/18/10/105002

Authors: J Fang, J Fu, F Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W1964249809

FWCI:

Cites: 26

Cited by: 4

Related to: 10