Work

Comparison of microcantilever Hg sensing behavior with thermal higher order modes for as-deposited sputtered and thermally evaporated Au films

Year: 2006

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2345204

Authors: Ashwini R. Kadam, Gregory P. Nordin, Michael A. George

Institution: University of Alabama in Huntsville

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1964477457

FWCI: 0.337

Cites: 14

Cited by: 4

Related to: 10