Work

A CMOS-based integrated-system architecture for a static cantilever array

Year: 2007

Type: article

Source: Sensors and Actuators B Chemical

DOI: 10.1016/j.snb.2007.11.016

Authors: M. Zimmermann, T. Volden, K.-U. Kirstein, S. Hafizovic, J. Lichtenberg, Oliver Brand, A. Hierlemann

Institutions: ETH Zurich, Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Texas A and M University, Eidgenössische Technische Hochschule Zürich, Office of Science

OpenAlex ID: W1964787128

FWCI: 1.26

Cites: 44

Cited by: 22

Related to: 10