Work

Embedded optical sensors and data processing for thin film deposition

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.346246

Authors: David J. Robbins, Alan Marrs, Christopher Pickering, Allister W. Dann, John L. Glasper, John Russell

Language: English

Topic: Calibration and Measurement Techniques

Subfield: Aerospace Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1964792747

FWCI: 0.882

Cites:

Cited by: 1

Related to: 10