Work

A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Year: 2002

Type: article

Source: Journal of the Mechanics and Physics of Solids

DOI: 10.1016/s0022-5096(02)00062-5

Authors: H.D Espinosa, B.C Prorok, M Fischer

Institution: Northwestern University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Office of Naval Research

Awards: G105387835, CAREER: Tribo-Mechanics of Nanostructured Materials, Nanoscale Science & Engineering Center for Integrated Nanopatterning and Detection Technologies

OpenAlex ID: W1964800497

FWCI: 31.37

Cites: 25

Cited by: 341

Related to: 10