Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems (MEMS)
Year: 1999
Type: conference-paper
DOI: 10.1117/12.341230
Author: Andrzej J. Przekwas
Institution: CFD Research Corporation (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1965202192