dc reactive magnetron sputtering of titanium-structural and optical characterization of TiO2 films
Year: 1992
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.351264
Authors: M. H. Suhail, G. Mohan Rao, S. Mohan
Institution: Indian Institute of Science Bangalore
Language: English
Field: Energy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1965203572
