Work

Low-thermal-budget process modeling with the PREDICT computer program

Year: 1988

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/16.2452

Author: R.B. Fair

Institutions: Duke University, MCNC Research and Development Institute

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1965313545

FWCI: 8.262

Cites: 22

Cited by: 44

Related to: 10