Work

From nuclear physics to semiconductor manufacturing: the making of ion implantation

Year: 2009

Type: article

Source: History and Technology

DOI: 10.1080/07341510903083211

Authors: Christophe Lécuyer, David C. Brock

Language: English

Topic: Historical Studies and Socio-cultural Analysis

Subfield: History and Philosophy of Science

Field: Arts and Humanities

Domain: Social Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: Chemical Heritage Foundation

OpenAlex ID: W1965322020

FWCI: 6.197

Cites: 70

Cited by: 15

Related to: 10