Tailor-made precursors for the deposition of Sb-containing materials by the MOCVD process
Year: 2008
Type: article
Source: Journal of Crystal Growth
Authors: Daniella Schuchmann, Marcel Schwartz, Stephan Schulz, Andreas Seemayer, Klaus Wandelt
Institutions: University of Duisburg-Essen, University of Bonn
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W1965330921