Work

Dynamic tuning of MEMS resonators via electromechanical feedback

Year: 2015

Type: article

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/tuffc.2014.006570

Authors: Arashk Norouzpour-Shirazi, Mojtaba Hodjat-Shamami, Roozbeh Tabrizian, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1965436683

FWCI: 0.995

Cites: 12

Cited by: 23

Related to: 10