Work

Design and simulation of comb-drive actuators incorporating gray-scale technology for tailored actuation characteristics (Invited Paper)

Year: 2005

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.608529

Authors: Brian Morgan, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1965553755

FWCI: 0.55

Cites:

Cited by: 1

Related to: 10