Work

Relaxation of the step profile for different microscopic mechanisms

Year: 1996

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.588836

Authors: Da-Jiang Liu, Elain S. Fu, M. D. Johnson, John D. Weeks, Ellen D. Williams

Institution: University of Maryland, College Park

Language: English

Topic: Surface and Thin Film Phenomena

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1966485542

FWCI: 4.132

Cites:

Cited by: 31

Related to: 10