Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses
Year: 2003
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.1545159
Institution: Harvard University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1966664178
