Work

Design and fabrication of mechanical-resonance-based optical scanner using push-pull actuator

Year: 2012

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.915283

Authors: Kebin Gu, Chi Leung Tsui, Joe Ho, Wei-Chih Wang

Institutions: University of Washington, National Cheng Kung University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1967040738

FWCI: 0.409

Cites:

Cited by: 2

Related to: 10