Work

Shear sensitive silicon piezoresistive tactile sensor prototype

Year: 1998

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.323909

Authors: Lin Wang, David J. Beebe

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968496540

FWCI: 1.284

Cites:

Cited by: 5

Related to: 10