Work

Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

Year: 1995

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.359562

Authors: G. Y. Chen, T. Thundat, E. A. Wachter, R. J. Warmack

Institution: Oak Ridge National Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968514543

FWCI: 6.946

Cites: 24

Cited by: 542

Related to: 10