Reliable EBT fine positioning using correlation-based window adjustment
Work
Year: 1994
Type: article
Source: Microelectronic Engineering
Institutions Friedrich-Alexander-Universität Erlangen-Nürnberg, Karlsruhe Institute of Technology, Fraunhofer Society
Cites: 4
Cited by: 1
Related to: 10
FWCI: 0.426
Citation percentile (by year/subfield): 35.85
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed