Work

SU-8 focus control mirrors released by XeF 2 dry etch

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.877077

Authors: Sarah J. Lukes, David L. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W1968761867

FWCI: 1.301

Cites:

Cited by: 8

Related to: 10