Work

Centimeter-scale MEMS scanning mirrors for high power laser application

Year: 2015

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2079600

Authors: F. Senger, U. Hofmann, T. v. Wantoch, C. Mallas, J. Janes, W. Benecke, Patrick Herwig, P. Gawlitza, M. Ortega-Delgado, C. Grune, J. Hannweber, A. Wetzig

Institutions: Fraunhofer Institute for Silicon Technology, Fraunhofer-Gesellschaft

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968833484

FWCI: 2.89

Cites: 26

Cited by: 23

Related to: 10