Work

Vapor-Phase Self-Assembled Monolayer for Improved Mold Release in Nanoimprint Lithography

Year: 2005

Type: article

Source: Langmuir

DOI: 10.1021/la0476938

Authors: Gun-Young Jung, Zhiyong Li, Wei Wu, Yong Chen, Deirdre L. Olynick, Shih-Yuan Wang, William M. Tong, R. Stanley Williams

Institutions: Hewlett-Packard (United States), Lawrence Berkeley National Laboratory, University of California, Los Angeles

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1968898258

FWCI: 13.25

Cites: 11

Cited by: 284

Related to: 10