Work

Laser spike anneal macro & micro non-uniformity investigation using modulated optical reflectance and four-point-probe

Year: 2010

Type: conference-paper

DOI: 10.1109/iwjt.2010.5474916

Authors: Yonggen He, Yong Chen, Guobin Yu, Albert Hong, Jiong-Ping Lu, Xianghua Liu, Lu Yu, Yue Chen

Institutions: Semiconductor Manufacturing International (China), KLA (United States)

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968960892

FWCI:

Cites:

Cited by: 1

Related to: 10