Remediation of Line Edge Roughness in Chemical Nanopatterns by the Directed Assembly of Overlying Block Copolymer Films
Year: 2010
Type: article
Source: Macromolecules
DOI: 10.1021/ma902494v
Authors: Mark P. Stoykovich, Kostas Ch. Daoulas, Marcus Müller, Huiman Kang, Juan J. de Pablo, Paul F. Nealey
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1970102341
