MEMS mirror for flexible z-axis control in a commercial confocal microscope
Year: 2012
Type: conference-paper
Authors: Sarah J. Lukes, David L. Dickensheets
Institution: Montana State University
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W1970373963
