Work

Soft UV-nanoimprint lithography on non-planar surfaces

Year: 2011

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2011.07.010

Authors: Bahador Farshchian, Alborz Amirsadeghi, Steven M. Hurst, Jiahao Wu, Jaejong Lee, Sunggook Park

Institutions: Louisiana State University, Korea Institute of Machinery & Materials

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W1970459697

FWCI: 1.704

Cites: 32

Cited by: 33

Related to: 10